Abstract: We have developed the power-efficient super computer ZettaScaler series. In the first generation, ZettaScaler-1.x, we adopted three novel technologies, “MIMD ultra-manycore processor called “PEZY-SC”, “High density server board Brick”, and “direct liquid immersion cooling system”. They enable us to realize high performance, low power consumption, and space miniaturization at a same time. In this talk, we will explain about unique hardware technologies and programming model of ZettaScaler-1.0 generation. In addition, we will mention 3-dimensional mounting technology with DRAM by magnetic coupling TCI (ThruChip Interface), new Brick structure, and enhanced cooling system with respect to the next generation ZettaScaler-2.0 which is currently being constructed.